This study employed a carbon microelectromechanical system (C-MEMS) in fabricating a 3D micro-electrode array of conductive carbon cylinders directly on the surface of a graphite substrate. The capacitance of the array was further enhanced by decorating it with a composite material comprising highly-porous carbon nanofibers (CF) and electroactive RuO₂ nanoparticles to function as an active electrode. In galvanostatic charge-discharge tests, the specific capacitance of an electrode decorated with RuO₂ 30 wt%/CF was 219.2 F g⁻¹ at a current density of 0.5 A g⁻¹, which is 2.27 times higher than that of the pristine CF electrode. When the current density was increased from 0.5 A g⁻¹ to 3 A g⁻¹, the capacitance retention of the RuO₂ 30 wt%/CF electrode was 54.8%. A symmetric supercapacitor based on the RuO₂ 30 wt%/CF composite electrode exhibited an impressive energy density of 74.2 Wh kg⁻¹ with power density of 4333 W kg⁻¹. It also demonstrated good capacitance retention of 80.2% following 3000 consecutive charge/discharge cycles at a current density of 2 A g⁻¹.

这项研究采用碳微机电系统（C-MEMS）直接在石墨基板的表面上制造了导电碳圆柱的3D微电极阵列。通过用包含高孔碳纳米纤维（CF）和电活性RuO ₂纳米颗粒的复合材料装饰它作为有源电极，可以进一步提高该阵列的电容。在恒电流充放电试验中，装饰用RuO的电极的比电容₂ 30％（重量）/ CF为219.2 F G ^-1以0.5 g的电流密度^-1，它比原始CF的2.27倍电极。当电流密度从0.5 A g ^-1增加到3 A g ^-1时，RuO ₂ 30wt％/ CF电极的电容保持率为54.8％。基于RuO ₂ 30 wt％/ CF复合电极的对称超级电容器展现出令人印象深刻的74.2 Wh kg ^-1的能量密度和4333 W kg ^-1的功率密度。在电流密度为2 A g ^-1的情况下，经过3000次连续的充电/放电循环，还显示出80.2％的良好电容保持率。