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Reaction mechanisms of chlorine reduction on hydroxylated alumina in titanium nitride growth: first principles study
Applied Surface Science ( IF 6.3 ) Pub Date : 2021-02-24 , DOI: 10.1016/j.apsusc.2021.149391 Woojin Choi , Sungwoo Lee , Dong-Hoon Han , Hong Taek Lim , Hwanyeol Park , Gun-Do Lee
中文翻译:
氮化钛生长过程中氯还原对羟基氧化铝的反应机理:第一原理研究
更新日期:2021-02-24
Applied Surface Science ( IF 6.3 ) Pub Date : 2021-02-24 , DOI: 10.1016/j.apsusc.2021.149391 Woojin Choi , Sungwoo Lee , Dong-Hoon Han , Hong Taek Lim , Hwanyeol Park , Gun-Do Lee
中文翻译:
氮化钛生长过程中氯还原对羟基氧化铝的反应机理:第一原理研究