Abrasive slurry jet (ASJ) machining technology is highly desirable to meet the increasing demand for machining of micro-structures on difficult-to-machine materials, like ceramics and glasses. However, by employing the relatively low pressure ASJ with small abrasive particles usually results in W-shaped bottom surface of micro-hole while to use the relatively large abrasive particles involved in ASJ could eliminate the W-shaped profile but the bottom surface quality seems not to be good. In this paper, the ultrasonic vibration-assisted abrasive slurry jet machining of micro-holes on K9 glasses was proposed to enhance the machining performance. It is found that the effect of ultrasonic vibration on the particle trajectories and the resultant particle dynamic impact process in the stagnation zone significantly contributes to the performance enhancement of micro-hole, including the material removal rate and bottom surface morphology, rather than its effect on inducing the additional brittle erosion due to the less increase of particle impact energy. Further, the bottom surface quality has also found to be enhanced because the periodical vibration of the workpiece would affect the fluid streamlines in the stagnation where it not only enables more particles to participate the material removal process but also drives more after-impact particles to roll over and smooth the machined surface due to the viscous flow induced secondary or multiple particle impacts, and hence, resulting in a smoother surface.

迫切需要砂浆喷射（ASJ）加工技术，以满足在难加工材料（如陶瓷和玻璃）上加工微结构的日益增长的需求。但是，通过在较小的磨料颗粒下使用相对较低压力的ASJ，通常会产生W形的微孔底面，而使用ASJ所涉及的较大的磨料颗粒可以消除W形轮廓，但底面质量似乎不能做得好。为了提高加工性能，本文提出了超声振动辅助砂浆喷射微孔加工的方法。研究发现，超声振动对颗粒轨迹的影响以及在停滞区所产生的颗粒动态冲击过程，极大地促进了微孔性能的提高，包括材料去除率和底面形态，而不是其对材料的影响。由于颗粒冲击能量的增加较少，导致额外的脆性腐蚀。此外，还发现底表面质量得到了提高，因为工件的周期性振动会影响停滞状态中的流体流线，不仅使更多的颗粒参与材料去除过程，而且还会驱动更多的撞击后颗粒滚动由于粘性流引起的二次或多次粒子撞击，使加工过的表面光滑并经过加工的表面，因此，