Prior work is primarily focused on observation and analysis of experimental results of fatigue loadings, while an insightful damage model describing the evolvement of distributed micro/nano cracks before they can be readily observed is still missing. A fatigue damage model is developed to quantify the damage due to micro/nano cracking in crystalline silicon structure and the native oxide layer. From the physical point of view, the developed model links the fatigue life to average crack length, maximum applied stress, resonant frequency and stiffness. The effectiveness of the proposed damage model is verified through simulations and experimental results from previous work.

先前的工作主要集中在疲劳载荷的实验结果的观察和分析上，而仍然缺少描述可观察到的微小/纳米裂纹的演变的有洞察力的损伤模型。建立了疲劳损伤模型以量化由于晶体硅结构和天然氧化物层中的微/纳米裂纹而造成的损伤。从物理角度来看，开发的模型将疲劳寿命与平均裂纹长度，最大施加应力，共振频率和刚度联系起来。通过模拟和先前工作的实验结果验证了所提出的损伤模型的有效性。