Abstract

The evolution of the morphology of island poly(chloro-p-xylylene) films formed on silicon substrates by vapor deposition polymerization is investigated by atomic force microscopy. The dependences of the effective thickness of the island coating, the number density of polymer islands, and their average size on the surface coverage are studied. The maximal density of polymer islands and the surface coverage corresponding to the transition to the coalescence regime are estimated. Within the framework of the theory of dynamic scaling, the size distribution of islands and the size distribution of their “capture zones” are analyzed. It is shown that, at low degrees of filling of the substrate, before the coalescence of islands, these distributions are described by scaling functions corresponding to the model of reaction-limited aggregation. The size of the critical nucleus is estimated from the size distributions of the “capture zones” of polymer islands.

中文翻译：

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聚对氯二甲苯涂层的岛状生长

摘要

岛上多形态的演变（氯p通过原子力显微镜研究了通过气相沉积聚合在硅衬底上形成的-（亚二甲苯基）膜。研究了岛状涂层的有效厚度，聚合物岛的数量密度及其平均大小对表面覆盖率的依赖性。估计了聚合物岛的最大密度和对应于过渡到聚结状态的表面覆盖率。在动态缩放理论的框架内，分析了岛屿的大小分布及其“捕获区”的大小分布。结果表明，在低填充度的衬底上，在岛合并之前，这些分布是通过与反应受限聚集模型相对应的缩放函数来描述的。