A symmetrical micro-gripper structure is designed via the Scott-Russell mechanism. The kinematic and dynamic models are established through pseudo-rigid-body method and Lagrange’s method, which are verified by finite element modeling. The hysteresis inverse compensator via Bouc–Wen model is applied to describe the micro-gripper system and their parameters are also identified via least square optimization method. An adaptive backstepping sliding mode controller involving hysteresis compensator is applied for eradicating the hysteresis influence. Meanwhile, for expressing the merit of proposed controller, backstepping sliding mode controller without adaptive control law and PID controller is also carried out. The simulation and experimental results demonstrate that natural frequency of working direction is about 815.77 Hz, the amplification ratio in two axes is approximated to be 7.73. The test errors for two jaws are around 4% and the tracking errors are less than 2% for the selected controller.

通过Scott-Russell机构设计了对称的微爪结构。通过伪刚体法和拉格朗日法建立了运动学和动力学模型，并通过有限元建模对其进行了验证。采用Bouc–Wen模型的磁滞逆补偿器来描述微夹持器系统，并通过最小二乘法优化方法确定其参数。为了消除磁滞影响，采用了具有磁滞补偿器的自适应反步滑模控制器。同时，为了表达所提出的控制器的优点，还采用了没有自适应控制律的后推滑模控制器和PID控制器。仿真和实验结果表明，工作方向固有频率约为815.77 Hz，在两个轴上的放大率近似为7.73。对于选定的控制器，两个钳口的测试误差约为4％，跟踪误差小于2％。