Titanium and helium were simultaneously deposited on a titanium thin film sample to prepare a sample with nanocone structures. It was confirmed that the shape and size of the surface structure varied with the change of the amount of titanium deposition. The crystal structure after oxidation treatment in the air had an anatase structure. A combination of the anatase structure, and the increase in the surface area could be beneficial for photocatalytic applications.

中文翻译：

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氦等离子体中钛沉积制备纳米结构钛薄膜

钛和氦同时沉积在钛薄膜样品上以制备具有纳米锥结构的样品。证实了表面结构的形状和尺寸随着钛沉积量的变化而变化。在空气中氧化处理后的晶体结构具有锐钛矿结构。锐钛矿结构和表面积增加的结合可能有利于光催化应用。