Zinc oxide has attracted attention because of its unique properties that can be modified by doping. In this paper, we investigate the effects of oxygen addition to argon plasma during the sputtering of vanadium and aluminum co-doped zinc oxides. We find that reactive sputtering with oxygen is effective at reducing defects that degrade electrical conductivity and optical transmittance. Further, the effect of oxygen is enhanced when both aluminum and vanadium are co-doped in zinc oxide, resulting in compensation of the defects. Under an optimum condition, an electrical resistivity of 1.2mΩcm and a 78% of transmittance were achieved.

中文翻译：

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Al-V共掺杂和氧反应溅射对ZnO薄膜电学和光学性质的协同效应

氧化锌由于其可以通过掺杂而改变的独特性能而引起了人们的关注。在本文中，我们研究了在钒和铝共掺杂氧化锌的溅射过程中，向氩气等离子体中添加氧的影响。我们发现，用氧气进行反应性溅射可有效减少会降低电导率和透光率的缺陷。此外，当铝和钒共同掺杂在氧化锌中时，氧的作用增强，导致缺陷的补偿。在最佳条件下，电阻率为1.2mΩcm，透射率为78％。