Photoacid generators are used as components of photocurable polymer formulations and chemically amplified photoresists in microelectronics industry. In recent years, these compounds gained importance as components of various engineering materials. The review presents the classification of photoacid generators and summarizes data on photochemical processes giving photoacids. A special section is devoted to practical applications of photoacid generators and the current state of their development.

The bibliography includes 118 references.

中文翻译：

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光酸产生剂。应用及发展现状

光产酸剂在微电子工业中用作光固化聚合物配方和化学放大光刻胶的成分。近年来，这些化合物作为各种工程材料的成分越来越重要。该综述介绍了光酸产生剂的分类，并总结了光化学过程产生光酸的数据。一个专门的部分专门介绍光产酸剂的实际应用及其发展现状。

参考书目包括 118 篇参考文献。