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Determination of a grown oxide layer thickness and optical constants of Zn and Cd metals
Optik Pub Date : 2021-02-18 , DOI: 10.1016/j.ijleo.2021.166552
Mohamed Shehata , Alshaimaa W. Abdallah , Sobhy S. Ibrahim , Mohamed H. Osman , Nabil N. Nagib

Optical constants of Zn and Cd polycrystalline metals are measured using both quasi polarizing angle and principal angle of incidence methods at wavelength 633 nm. The quasi polarizing angle is the angle at which the intensity of the p-polarized reflection component reaches its minimum value. It depends only on the rotation of the sample using a rotating stage (with accuracy ± 0.1º) without moving any other parts in the optical setup. This method is considered the most accurate method for determining the optical constants of metal. These two methods are performed to investigate the difference between the quasi polarizing angle and the principal angle of incidence and to determine the optical constants of Zn and Cd metals. To verify the optical constants results of both methods, the same metals are measured by manual null ellipsometer. Very strong correlation is found between all results of optical constants. The thickness of a grown oxide layer, which is naturally formed on the surface of a metal, is measured using PHE-103 spectroscopic ellipsometer. A polishing process is performed to each metal before measuring the thickness of the grown oxide layer with time. It is found that the formed layers grow up faster after polishing and the rate of growth decreases with time. In a period of 144 h, the oxide layer formed on zinc is about three times that formed on cadmium.



中文翻译:

Zn和Cd金属的生长氧化物层厚度和光学常数的测定

Zn和Cd多晶金属的光学常数是使用准偏振角和主入射角法在633 nm波长下测量的。准偏振角是p偏振反射分量的强度达到最小值的角度。它仅取决于使用旋转台(精度为±0.1º)的样品旋转,而不会移动光学装置中的任何其他部件。该方法被认为是确定金属光学常数最准确的方法。执行这两种方法来研究准偏振角和主入射角之间的差异,并确定Zn和Cd金属的光学常数。为了验证两种方法的光学常数结果,使用手动零椭圆仪测量相同的金属。在所有光学常数结果之间发现非常强的相关性。使用PHE-103光谱椭偏仪测量自然形成在金属表面上的生长氧化物层的厚度。在随时间测量生长的氧化物层的厚度之前,对每种金属执行抛光工艺。发现形成的层在抛光后生长更快,并且生长速率随时间降低。在144小时内,在锌上形成的氧化物层约为在镉上形成的氧化物层的三倍。在随时间测量生长的氧化物层的厚度之前,对每种金属执行抛光工艺。发现形成的层在抛光后生长更快,并且生长速率随时间降低。在144小时内,在锌上形成的氧化物层约为在镉上形成的氧化物层的三倍。在随时间测量生长的氧化物层的厚度之前,对每种金属执行抛光工艺。发现形成的层在抛光后生长更快,并且生长速率随时间降低。在144小时内,在锌上形成的氧化物层约为在镉上形成的氧化物层的三倍。

更新日期:2021-02-25
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