Abstract—

The gas-jet method of the deposition of diamond-like structures using super-high-frequency (SHF) discharge for activating gases is considered. Direct statistical simulation is applied to analyze the gasdynamic processes occurring in the conditions of the gas-jet deposition of diamond structures. An activated gas flow in a nozzle is investigated and a considerable influence of the processes in the compressed layer formed near the substrate on the rate of synthesis of diamond structures is established. The regimes of flow of mixture components activated in the discharge chamber toward the substrate are determined and a considerable deceleration of heavy components in the compressed layer is found to exist. It is shown that with increase in the pressure in the deposition chamber from 10 to 80 Torr the crystal growth rate increases fourfold at the expense of an increase in the specific flux of the activated components toward the substrate.

中文翻译：

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金刚石沉积中微波放电中活化气体的超音速射流的使用

摘要-

考虑了使用超高频（SHF）放电来活化气体的类金刚石结构沉积的气体喷射方法。直接统计模拟用于分析在金刚石结构的气体喷射沉积条件下发生的气体动力学过程。研究了喷嘴中的活化气流，并确定了在基材附近形成的压缩层中的工艺对金刚石结构合成速率的重大影响。确定了在排放室中活化的混合成分流向基材的流动方式，发现压缩层中的重成分存在相当大的减速。