The optical planar waveguides were fabricated by proton implantation with an energy of 400 keV and a dose of 8 × 1016 ions / cm2 or 400-keV helium-ion implantation with a fluence of 6 × 1016 ions / cm2 in the fluoride lead silicate glass. The morphologies were studied by a Zeiss microscope to estimate the thickness of the waveguides. The annealing effects on the fluoride lead silicate glass waveguides were investigated by 60 min annealing cycles at different temperatures ranging from 260°C to 310°C in air atmosphere. The dark-mode spectra and corresponding effective refractive indices before and after the thermal treatments were measured by the prism coupling system. The Stopping and Range of Ions in Matter 2013 code was used to simulate the irradiation process and calculate the energy losses. The refractive index distributions were reconstructed by the reflectivity calculation method. The near-field light intensity profiles of the proton and helium-ion implanted fluoride lead silicate glass waveguides were measured by the end-face coupling system. The comparison of optical properties between the proton-implanted waveguide and helium-ion implanted one was carried out. The experimental results show that the helium-ion implantation is more suitable for the fabrication of the fluoride lead silicate glass optical waveguides and the He + -implanted waveguide has better optical propagation performances.

中文翻译：

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质子和氦离子注入形成的氟化铅硅玻璃上平面波导的光学特性和退火效应

通过在氟化铅硅酸盐玻璃中以400 keV的能量注入8×1016离子/ cm2的剂量的质子注入或以6×1016离子/ cm2的注入量的400keV的氦离子注入来制造光学平面波导。通过蔡司显微镜研究了形态，以估计波导的厚度。通过在大气中260°C至310°C的不同温度下进行60分钟的退火循环，研究了对氟化铅硅酸盐玻璃波导的退火效果。通过棱镜耦合系统测量热处理前后的暗模式光谱和相应的有效折射率。“物质中的离子的终止和范围” 2013代码用于模拟辐照过程并计算能量损失。通过反射率计算方法重建折射率分布。通过端面耦合系统测量了质子和氦离子注入的氟化铅硅酸盐玻璃波导的近场光强度分布。进行了质子注入波导和氦离子注入波导之间的光学性能比较。实验结果表明，氦离子注入更适合于制备氟化铅硅酸盐玻璃光波导，氦离子注入的波导具有更好的光传输性能。进行了质子注入波导和氦离子注入波导之间的光学性能比较。实验结果表明，氦离子注入更适合于制备氟化铅硅酸盐玻璃光波导，氦离子注入的波导具有更好的光传输性能。进行了质子注入波导和氦离子注入波导之间的光学性能比较。实验结果表明，氦离子注入更适合于制备氟化铅硅酸盐玻璃光波导，氦离子注入的波导具有更好的光传输性能。