ABSTRACT

In this paper, we propose the tilted milling method for the fabrication of the precise microlens array (MLA) by eliminating the influence of tool error. In the conventional milling process, the surface morphology problem especially hump formation is often provoked by tool error on the center area of the machined surface. The hump formation initiated by tool error is very difficult to remove, unless the cutting tool is replaced by a new one. It was found that the hump formation was completely suppressed by the tilted milling method which the tool-axis angle is tilted by 35° to the on-axis of lens curvature. The form accuracy of the MLA was also drastically improved the peak-to-valley ratio from (0.991 to 0.141) µm. The tilted milling method was confirmed to be a highly robust fabrication process, because the surface morphology was rarely affected by tool error, especially the run-out deviation.

摘要

在本文中，我们提出了通过消除工具误差的影响来制造精密微透镜阵列（MLA）的倾斜铣削方法。在传统的铣削加工中，加工表面中心区域的刀具误差往往会引发表面形貌问题，尤其是隆起的形成。由刀具错误引发的驼峰形成很难消除，除非更换新刀具。发现通过倾斜铣削方法完全抑制了驼峰的形成，该方法使刀具轴角度与透镜曲率轴倾斜 35°。MLA 的形状精度也显着提高，峰谷比从 (0.991 到 0.141) µm。倾斜铣削方法被证实是一种高度稳健的制造工艺，