This work presents three new narrowband radio frequency (RF) microelectromechanical systems (MEMS) filters made from mechanical or electrically coupled resonators with a quality factor Q of over 10 000. A low-stiffness rectangular-frame mechanical coupling beam (RFCB) is designed, and a filter with an RFCB is successfully developed with a center frequency of 75.5 MHz and a percent bandwidth (BW) of 0.4%. In addition, a tunable narrowband filter is achieved with a mechanically coupled four-disk linear structure filter. The center frequencies are 74.47 0.54 MHz and the percent BW range is 0.48%–2.2%. In order to further simplify the architecture of the filter, a filter based on a single whisper gallery mode disk resonator is demonstrated, which has a center frequency of 79.42 MHz and a BW of only 0.25%. The three different RF MEMS filters have potential applications in wireless communication systems.

这项工作提出三个新的窄带射频（RF）微机电系统（MEMS）的滤器从机械或电耦合的谐振器与由q uality因子Q设计了一种低刚度的矩形框架机械耦合梁（RFCB），并成功开发了具有RFCB的滤波器，其中心频率为75.5 MHz，带宽（BW）为0.4％。另外，利用机械耦合的四盘线性结构滤波器实现了可调窄带滤波器。中心频率为74.47 0.54 MHz，带宽百分比范围为0.48％–2.2％。为了进一步简化滤波器的结构，展示了基于单个耳语画廊模式磁盘谐振器的滤波器，其中心频率为79.42 MHz，BW仅为0.25％。三种不同的RF MEMS滤波器在无线通信系统中具有潜在的应用。