Terahertz (THz) waves are a promising candidate for detection, imaging, and advanced communications with ultrafast transmission speed. To develop THz technologies, miniaturized devices for controlling THz waves are essential. In this study, a high-performance vanadium dioxide (VO₂)-based switchable band-pass metamaterial integrated with a silicon substrate for THz waves is designed and fabricated. In the “on” state, it offers a passband with a 70% depth and a 0.34 THz bandwidth at 0.56 THz frequency. Additionally, it can be switched thermally to a mirror for 0.1–2.0 THz waves in the “off” state by the phase transition effect of the VO₂ film. Moreover, the relationship between the line width and spectra of the device is investigated by simulation. The wheel-shaped gold structure with round corners provides the filter with tractability during fabrication. Furthermore, the silicon substrate allows the metamaterial to be readily miniaturized and integrated into micro-electromechanical systems (MEMS) technology. This filter is expected to be favorable in frequency-selective THz applications.

太赫兹（THz）波是具有超快传输速度的检测，成像和高级通信领域的有希望的候选者。为了开发太赫兹技术，用于控制太赫兹波的小型化设备必不可少。在这项研究中，设计和制造了一种高性能的基于二氧化钒（VO ₂）的可切换带通超材料，该材料与硅衬底集成在一起用于太赫兹波。在“开”状态下，它以0.56 THz的频率提供深度为70％的通带，带宽为0.34 THz。此外，通过VO ₂的相变效应，可以在“关闭”状态下将其热切换至0.1–2.0 THz波的反射镜电影。此外，通过仿真研究了器件的线宽和光谱之间的关系。具有圆角的轮状金结构使过滤器在制造过程中具有易处理性。此外，硅衬底允许超材料容易地被小型化并集成到微机电系统（MEMS）技术中。预期该滤波器在频率选择性太赫兹应用中将是有利的。