Graphene has shown considerable potential for sensing magnetic fields based on the Hall Effect, due to its high carrier mobility, low sheet carrier density, and low-temperature dependence. However, the cost of graphene in comparison to conventional materials has meant that its uptake in electronic manufacturing has been slow. To lower technological barriers and bring more widespread adoption of graphene Hall sensors, we are using a one-step laser scribing process that does not rely on multiple steps, toxic chemicals, and subsequent treatments. Laser-scribed graphene Hall sensors offer a linear response to magnetic fields with a normalized sensitivity of ~1.12 V/AT. They also exhibit a low constant noise voltage floor of ~ 50 nV/\(\sqrt {{\mathrm{Hz}}}\) for a bias current of 100 µA at room temperature, which is comparable with state-of-the-art low-noise Hall sensors. The sensors combine a high bendability, come with high robustness and operating temperatures up to 400 °C. They enable device ideas in various areas, for instance, soft robotics. As an example, we combined a laser-scribed graphene sensor with a deformable elastomer and flexible magnet to realize low-cost, compliant, and customizable tactile sensors.

石墨烯因其高载流子迁移率，低片载流子密度和低温依赖性而显示出了基于霍尔效应感测磁场的巨大潜力。然而，与常规材料相比，石墨烯的成本意味着其在电子制造中的吸收缓慢。为了降低技术壁垒并更广泛地采用石墨烯霍尔传感器，我们使用了一步式激光划刻工艺，该工艺不依赖多个步骤，有毒化学物质和后续处理。激光划刻的石墨烯霍尔传感器可对磁场产生线性响应，归一化灵敏度为〜1.12 V / AT。它们还表现出约50 nV / （（sqrt {{\ mathrm {Hz}}} \\）的低恒定噪声电压下限室温下的偏置电流为100 µA，可与最新的低噪声霍尔传感器媲美。传感器具有较高的可弯曲性，较高的耐​​用性和最高400°C的工作温度。它们支持软机器人等各个领域的设备创意。例如，我们将激光划刻的石墨烯传感器与可变形的弹性体和柔性磁体结合在一起，以实现低成本，顺应性和可定制的触觉传感器。