This work investigates the dynamics of a microbeam-based MEMS device in the neighborhood of a 2:1 internal resonance between the third and fifth vibration modes. The saturation of the third mode and the concurrent activation of the fifth are observed. The main features are analyzed extensively, both experimentally and theoretically. We experimentally observe that the complexity induced by the 2:1 internal resonance covers a wide driving frequency range. Constantly comparing with the experimental data, the response is examined from a global perspective, by analyzing the attractor-basins scenario. This analysis is conducted both in the third-mode and in fifth-mode planes. We show several metamorphoses occurring as proceeding from the principal resonance to the 2:1 internal resonance, up to the final disappearance of the resonant and non-resonant attractors. The shape and wideness of all the basins are examined. Although they are progressively eroded, an appreciable region is detected where the compact cores of the attractors involved in the 2:1 internal resonance remain substantial, which allows effectively operating them under realistic conditions. The dynamical integrity of each resonant branch is discussed, especially as approaching the bifurcation points where the system becomes more vulnerable to the dynamic pull-in instability.

这项工作研究了基于微束的MEMS器件在第三和第五振动模式之间的内部共振为2：1附近的动力学。观察到第三模式的饱和和第五模式的同时激活。主要特征在实验和理论上进行了广泛的分析。我们通过实验观察到，由2：1内部共振引起的复杂性涵盖了很宽的驱动频率范围。与实验数据不断进行比较，通过分析吸引盆情景从全局的角度检查响应。这种分析是在第三模式和第五模式平面中进行的。我们显示了从主共振到2：1内部共振的几个变形，直至共振和非共振吸引子最终消失。检查所有盆地的形状和宽度。尽管它们逐渐被侵蚀，但仍检测到一个明显的区域，在该区域中，参与2：1内部共振的吸引子的紧凑型核仍然很坚固，这使得它们可以在实际条件下有效运行。讨论了每个谐振分支的动态完整性，尤其是在接近分叉点时，系统变得更容易受到动态引入不稳定性的影响。可以在现实条件下有效地操作它们。讨论了每个谐振分支的动态完整性，尤其是在接近分叉点时，系统变得更容易受到动态引入不稳定性的影响。可以在现实条件下有效地操作它们。讨论了每个谐振分支的动态完整性，尤其是在接近分叉点时，系统变得更容易受到动态引入不稳定性的影响。