In this paper, a triangulation interpolation wavefront reconstruction algorithm is proposed to measure the full aperture map of the free-form surface. Based on the method we proposed, the free-form surface can be reconstructed with the scanning white light interferometry (SWLI). Applying the triangulation interpolation wavefront reconstruction algorithm, we provide an experimental demonstration by testing a 318 mm * 288 mm free-form surface in a rectangular shape. By comparing reconstruction results with computer-generated hologram (CGH) compensation testing result, it proves that the surface map can be got with high precision by using the wavefront reconstruction algorithm. In addition, we also test the free-form surface with a probe in contact measurement mode. It shows that with the white light scanning interferometry method, the surface map can be reconstructed with greater efficiency.

本文提出了一种三角插值波阵面重建算法来测量自由曲面的全孔径图。基于我们提出的方法，可以使用扫描白光干涉仪（SWLI）重建自由曲面。应用三角插值波前重建算法，我们通过测试318 mm * 288 mm的矩形自由曲面来提供实验演示。通过将重建结果与计算机生成的全息图（CGH）补偿测试结果进行比较，证明使用波前重建算法可以高精度获得表面图。此外，我们还使用探针在接触测量模式下测试自由曲面。结果表明，利用白光扫描干涉法，