Ka‐band distributed microelectromechanical systems transmission line phase shifter using metal air metal switch,International Journal of Circuit Theory and Applications

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Ka‐band distributed microelectromechanical systems transmission line phase shifter using metal air metal switch
International Journal of Circuit Theory and Applications ( IF 1.8 ) Pub Date : 2021-02-09 , DOI: 10.1002/cta.2949
Mir Majid Teymoori ₁ , Massoud Dousti ₁ , Saeid Afrang ₂

Affiliation

A new approach for designing a two‐state unit cell for a six‐bit distributed coplanar waveguide microelectromechanical systems (MEMS) phase shifter is proposed in this study. The proposed structure includes metal air metal (MAM) capacitors as switches and consists of a unit cell with one MEMS and two MAM switches to produce two phase shifts per unit cell. In the first state, the MAM switches are pulled down and a 5.625° phase shift is achieved, and in the second state, the MEMS switch is actuated to yield a phase shift of 11.25°. The designed structure is modeled using equivalent transmission line circuit model and simulated in the Ka‐band at 34 GHz, employing advanced design system (ADS), ANSOFT HFSS and COMSOL software. Based on the modeling and simulation results, the root‐mean‐square (RMS) phase error is 1.4°, and maximum return loss and minimum insertion loss for all 64 states are better than −10.1 and −1.45 dB, respectively. The main advantages of the designed structure are its small size, low loss, low phase error and a simple phase shift mechanism. A fabrication process is also proposed for the distributed MEMS transmission line (DMTL) phase shifter that shows the feasibility of the proposed design. The proposed structure can be easily scaled to other bands and used in applications with more bits as complex as phased array antennas.

中文翻译：

使用金属空气金属开关的Ka波段分布式微机电系统传输线移相器

在这项研究中，提出了一种为六位分布式共面波导微机电系统（MEMS）移相器设计两态单元的新方法。所提出的结构包括金属空气金属（MAM）电容器作为开关，并由带有一个MEMS的单元电池和两个MAM开关组成，以在每个单元电池中产生两个相移。在第一状态下，将MAM开关下拉，并获得5.625°的相移；在第二状态下，致动MEMS开关，以产生11.25°的相移。使用等效传输线电路模型对设计的结构进行建模，并使用高级设计系统（ADS），ANSOFT HFSS和COMSOL软件在34 GHz的Ka频段中对其进行仿真。根据建模和仿真结果，均方根（RMS）相位误差为1.4°，所有64个状态的最大回波损耗和最小插入损耗分别优于-10.1 dB和-1.45 dB。设计结构的主要优点是体积小，损耗低，相位误差低以及简单的相移机制。还提出了一种用于分布式MEMS传输线（DMTL）移相器的制造工艺，该工艺表明了所提出设计的可行性。所提出的结构可以容易地按比例缩放到其他频带，并用于具有比相控阵天线更复杂的比特的应用中。还提出了一种用于分布式MEMS传输线（DMTL）移相器的制造工艺，该工艺表明了所提出设计的可行性。所提出的结构可以容易地按比例缩放到其他频带，并用于具有比相控阵天线更复杂的比特的应用中。还提出了一种用于分布式MEMS传输线（DMTL）移相器的制造工艺，该工艺表明了所提出设计的可行性。所提出的结构可以容易地按比例缩放到其他频带，并用于具有比相控阵天线更复杂的比特的应用中。

更新日期：2021-02-09

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