This paper presents a novel fixed abrasive tool namely grain boundary cohesion fixed abrasive pellet (GBCFAP) which is able to provide higher finishing efficiency as well as better surface/subsurface quality of sapphire substrate during the chemo-mechanical grinding (CMG) process. The manufacturing procedures of GBCFAP are introduced in detail in this paper. It is found that the sintering temperature plays an important role to the strength of GBCFAP, and the strength of GBFCAP could be flexibly adjusted by sintering temperature. The experiment result suggests that the recommended sintering temperature ranges from 600 to 650 °C according to current CMG conditions. Meanwhile, comparing with conventional resin bound CMG wheel, 600 °C sintered GBCFAP CMG wheel performs better in terms of material removal rate and surface/subsurface quality since the chemical effect and mechanical effect during CMG process are well balanced. Meanwhile, the solid phase reaction between sapphire and Cr₂O₃ abrasive is demonstrated by TEM observation and XPS quantification.

本文提出了一种新颖的固定磨具，即晶界内聚固定磨粒（GBCFAP），它能够在化学机械研磨（CMG）过程中提供更高的精加工效率以及更好的蓝宝石衬底表面/亚表面质量。本文详细介绍了GBCFAP的制造过程。发现烧结温度对GBCFAP的强度起着重要作用，并且可以通过烧结温度灵活地调节GBFCAP的强度。实验结果表明，根据当前的CMG条件，推荐的烧结温度范围为600至650°C。同时，与传统的树脂约束CMG砂轮相比，600°C烧结的GBCFAP CMG砂轮在材料去除率和表面/亚表面质量方面表现更好，因为CMG过程中的化学效果和机械效果非常平衡。同时，蓝宝石与铬之间的固相反应通过TEM观察和XPS定量证明了₂ O ₃磨料。