Aerosol deposition (AD) is a thick-film deposition process that can produce films tens to hundreds of micrometers thick with densities greater than 95% of the bulk at room temperature. However, the precise mechanisms of bonding and densification are still under debate. To better understand and predict deposition, a self-consistent approach is employed that combines computational fluid dynamics (CFD), finite element (FE) modeling, and experimental observation of particle impact to improve the understanding of particle flight, impact, and adhesion in the AD process. First, deposition is performed with a trial material to form a film. The process parameters are fed into a CFD model that refines the particle flow and impact velocity for a range of sizes. These values are in turn used to inform the FE parameters to model the fracture and adhesion of the particle on the substrate. The results of FE modeling are compared to SEM images of fractured particles to complete a self-consistent numerical and experimental understanding of the AD process. Additional FE and CFD simulations are used to study how process parameters, materials, and particle parameters affect the deposition process and how the developed tools can be used to optimize deposition efficiency.

气溶胶沉积（AD）是一种厚膜沉积工艺，可在室温下生产数十至数百微米厚的膜，其密度大于体积的95％。但是，结合和致密化的确切机制仍在争论中。为了更好地理解和预测沉积，采用了一种自洽的方法，该方法结合了计算流体力学（CFD），有限元（FE）建模和对粒子撞击的实验观察，以增进对粒子飞行，撞击和附着力的了解。广告过程。首先，用试验材料进行沉积以形成膜。将过程参数输入到CFD模型中，该模型可以针对一定范围的尺寸优化粒子流和冲击速度。这些值依次用于告知FE参数，以模拟颗粒在基材上的断裂和粘附。将有限元建模的结果与断裂颗粒的SEM图像进行比较，以完成AD过程的自洽数值和实验理解。附加的有限元分析和CFD模拟用于研究工艺参数，材料和颗粒参数如何影响沉积过程，以及如何使用开发的工具来优化沉积效率。