Dielectric elastomer is a very popular composite material used for different applications. Calcium copper titanate (CCTO) particles have a high dielectric constant, while polydimethylsiloxane (PDMS) is a commonly used flexible elastomer with good elastic property and durable chemical resistance, and their composite has shown an important and unique character for the fabrication of the pressure/force sensor. To improve the sensitivity of the capacitive sensor, various elastomers’ microstructures have been introduced; but the methods used to manufacture microstructures in PDMS have so far been more difficult, requiring special equipment or hazardous chemicals such as strong acids and alkalis, otherwise, the sponge-like structures produced are slightly larger and cannot be applied to very small scenes. In this report, the extraction method was used to manufacture porous microstructures of the PDMS with multiple porosities; the influence of different porosities and pore sizes on the sensitivity of capacitive pressure sensors, which can increase the sensitivity of capacitive pressure sensors, the measuring force range, and also applied to tiny scenes, were explored. Additionally, the current methodology for manufacturing porous PDMS composite membranes is also suitable for the manufacture of other thinner PDMS composite porous membranes.

介电弹性体是一种非常流行的复合材料，可用于不同的应用。钛酸铜钙（CCTO）颗粒具有高介电常数，而聚二甲基硅氧烷（PDMS）是常用的柔性弹性体，具有良好的弹性和耐化学腐蚀性能，其复合材料在制造压力/压力方面表现出重要而独特的特性。力传感器。为了提高电容式传感器的灵敏度，已经引入了各种弹性体的微观结构。但是到目前为止，PDMS中用于制造微结构的方法更加困难，需要特殊的设备或有害化学物质（例如强酸和强碱），否则，所产生的海绵状结构会稍大，无法应用于非常小的场景。在这份报告中 采用萃取法制备了具有多个孔隙的PDMS的多孔微结构。探索了不同孔隙和孔径对电容式压力传感器灵敏度的影响，可以提高电容式压力传感器的灵敏度，测量力范围，并适用于微小的场景。另外，用于制造多孔PDMS复合膜的当前方法学也适合于制造其他更薄的PDMS复合多孔膜。