Electroplated FePt Films for Micromechanical Magnetic Sensors,Physica Status Solidi (A) - Applications and Materials Science

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Electroplated FePt Films for Micromechanical Magnetic Sensors
Physica Status Solidi (A) - Applications and Materials Science Pub Date : 2021-02-02 , DOI: 10.1002/pssa.202000547
Masaya Toda ₁ , Hao Xu ₁ , Takahito Ono ₁

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Herein, a ferromagnetic iron–platinum (FePt) film is deposited on a Si resonator by electroplating and patterned to form a magnetic sensor. The electroplating and annealing conditions of the FePt film are optimized to achieve micromachining with lower manufacturing costs than other deposition methods. The atomic ratio of electroplated Fe to Pt is nearly 1, which is controlled by a potential of −0.75 ± 0.02 V in a standard three‐electrode electroplating system. Hydrogen annealing is performed at 750 °C, yielding an Fe‐to‐Pt atomic ratio of nearly 1 and achieving a coercivity of 0.3 T, which are measured using a vibrating sample magnetometer. The electroplated FePt film is patterned using the lift‐off method, and the cantilever is fabricated through a standard micromachining process using a silicon‐on‐insulator wafer. The miniature Si resonator with the magnetized FePt film has a minimum detectable magnetic field of 20 nT. Such patterned magnets on resonators can be used for localized magnetic field detection with a magnetic moment sensitivity of ≈10⁵μ_B.

中文翻译：

用于微机械磁传感器的电镀FePt膜

此处，铁磁性铁铂（FePt）膜通过电镀沉积在Si谐振器上，并进行构图以形成磁传感器。FePt膜的电镀和退火条件经过优化，可实现微加工，且制造成本低于其他沉积方法。电镀的Fe与Pt的原子比接近1，这在标准的三电极电镀系统中由-0.75±0.02 V的电势控制。氢气退火是在750°C的温度下进行的，Fe / Pt原子比接近1，矫顽力为0.3 T，这是使用振动样品磁力计测量的。使用剥离方法对FePt电镀膜进行构图，并使用绝缘体上硅晶片通过标准的微加工工艺制造悬臂。具有磁化FePt膜的微型Si谐振器具有20 nT的最小可检测磁场。谐振器上的这种带图案的磁铁可用于磁矩灵敏度约为10的局部磁场检测⁵μ_乙。

更新日期：2021-02-02

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