A high‐performance microstrip lowpass filter with coplanar waveguide as the ports is proposed and analyzed. By cascading asymmetric hairpin resonators, a compact elliptic function low‐pass filter with wide stop band was realized. The filter was optimized using aggressive space mapping algorithm, and finally a filter with a cut‐off frequency of 11.8 GHz was obtained. Stop bandwidth with attenuation level better than −27 dB extends from 15.6 to 36 GHz. Also, the maximum insertion loss in the passband is 0.9 dB and the return loss is better than −22 dB. The filter is manufactured on the silicon wafer using micro‐electromechanical systems process, and the measured results in good agreement with the simulation results.

中文翻译：

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利用空间映射算法的MEMS低通滤波器的设计与制作

提出并分析了一种以共面波导为端口的高性能微带低通滤波器。通过级联不对称的发夹形谐振器，实现了具有宽阻带的紧凑型椭圆功能低通滤波器。使用积极的空间映射算法对滤波器进行了优化，最终获得了截止频率为11.8 GHz的滤波器。衰减水平优于−27 dB的停止带宽从15.6扩展到36 GHz。同样，通带中的最大插入损耗为0.9 dB，回波损耗优于−22 dB。该滤波器是使用微机电系统工艺在硅晶片上制造的，测量结果与仿真结果非常吻合。