Differential phase contrast scanning transmission electron microscopy (DPC STEM) is a technique to directly visualize local electromagnetic field distribution inside materials and devices at very high spatial resolution. Owing to the recent progress in the development of high-speed segmented and pixelated detectors, DPC STEM now constitutes one of the major imaging modes in modern aberration-corrected STEM. While qualitative imaging of electromagnetic fields by DPC STEM is readily possible, quantitative DPC STEM is still under development because of the several fundamental issues inherent in the technique. In this report, we review the current status and future prospects of DPC STEM for quantitative electromagnetic field imaging from atomic-scale to mesoscopic scale.

中文翻译：

---

通过差分相位对比扫描透射电子显微镜进行定量电磁场成像

微分相差扫描透射电子显微镜 (DPC STEM) 是一种以非常高的空间分辨率直接可视化材料和设备内部局部电磁场分布的技术。由于高速分段和像素化探测器的最新发展，DPC STEM 现在构成了现代像差校正 STEM 中的主要成像模式之一。虽然通过 DPC STEM 对电磁场进行定性成像很容易，但由于该技术固有的几个基本问​​题，定量 DPC STEM 仍在开发中。在本报告中，我们回顾了 DPC STEM 从原子尺度到细观尺度定量电磁场成像的现状和未来前景。