Single-point diamond turning (SPDT) is a machining process with high levels of profile accuracy and nanometric surface characteristics. SPDT is a leading technology in advanced manufacturing of ultra-precision optical components for critical applications. Different efforts have been undertaken to improve the cutting condition and optimize the machining parameters during SPDT. The implementation of on-machine metrology system (OMMS) has helped to improve the outcomes of SPDT in terms of machined profile accuracy and understand the effects of various processing parameters on optical surface generation. OMMS could be implemented in the hybrid SPDT platforms to effectively improve machining conditions by measuring and diagnosing, and providing testing procedures. Different sensors and principles have been used in the design and development of OMMS including laser-based optical systems. However, measuring the micrometric and nanometric parameters during diamond cutting is difficult to achieve at relatively low resolutions. The purpose of this study is to design and simulate an electro-optical vibrometer (EOV) for measuring machine-tool and workpiece vibration during the SPDT process. The proposed EOV has the capability of measuring, monitoring, and analyzing the vibration characteristics in different machining conditions. In addition, the designed system can communicate with the main control units of the hybrid SPDT platforms. Design specifications and simulation results have shown that the implemented mechanism is functional and has met requirements for a successful profiling vibrometry system that can be employed on SPDT machines.

单点金刚石车削（SPDT）是具有高轮廓精度和纳米表面特性的加工过程。SPDT是用于关键应用的超精密光学组件的先进制造中的领先技术。为了改善切削条件并优化SPDT期间的加工参数，已经进行了各种努力。机上计量系统（OMMS）的实施已帮助改善了SPDT的加工轮廓精度，并了解了各种加工参数对光学表面生成的影响。OMMS可以在混合SPDT平台中实施，以通过测量和诊断以及提供测试程序来有效改善加工条件。OMMS的设计和开发中使用了不同的传感器和原理，包括基于激光的光学系统。然而，在相对较低的分辨率下很难实现在金刚石切割过程中测量微米和纳米参数。这项研究的目的是设计和模拟一个电光振动计（EOV），以测量SPDT过程中的机床和工件振动。提出的EOV具有测量，监视和分析不同加工条件下的振动特性的能力。此外，设计的系统可以与混合SPDT平台的主控制单元进行通信。