Abstract

In this study, zinc oxide (ZnO) thin films deposited on to glass substrates have been manufactured by sol–gel spin coating method at various spin speed and time. The effect of spin speed and time on film thickness, structural properties, and residual stress parameters has been investigated. Scanning electron microscope investigations have shown that the thickness of films has changed depending on coating parameters. X-ray diffraction measurements have indicated that polycrystalline films have formed with hexagonal wurtzite structure on the sample surfaces. The values of residual stress on the ZnO film have enhanced with increasing coating speed and also decreased with increasing film thickness. The UV transmittance of the prepared thin films has changed between 70% and 95% depending on the coating speed and time. The fluorescence measurements of the thin films have been determined in the spectral range from 350 nm to 900 nm. It has been observed that the fluorescent intensity has a high value in 2000 rpm-50 s. Furthermore, the electrical conductivities of the ZnO films have increased by diminishing the film thickness.

摘要

在这项研究中，通过溶胶-凝胶旋涂法以各种旋转速度和时间制造了沉积在玻璃基板上的氧化锌（ZnO）薄膜。研究了旋转速度和时间对薄膜厚度，结构性能和残余应力参数的影响。扫描电子显微镜研究表明，膜的厚度已根据涂层参数而改变。X射线衍射测量表明，在样品表面上已形成具有六方纤锌矿结构的多晶膜。ZnO膜上的残余应力值随着涂覆速度的增加而增加，并且随着膜厚度的增加而减小。所制备的薄膜的紫外线透射率根据涂布速度和时间在70％至95％之间变化。已经在350nm至900nm的光谱范围内确定了薄膜的荧光测量值。已经观察到荧光强度在2000 rpm-50 s具有高值。此外，通过减小膜厚度，增加了ZnO膜的电导率。