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Thermal Stabilization of the Geometric Parameters of an Array of Silver Nanoparticles Obtained by Vacuum-Thermal Evaporation on an Unheated Substrate
Russian Microelectronics Pub Date : 2021-01-27 , DOI: 10.1134/s1063739720070033
D. G. Gromov , S. V. Dubkov , G. S. Eritsyan , A. I. Savitsky , V. A. Bykov , Yu. A. Bobrov

Abstract

The nanoscale state for many substances differs significantly from the massive state. During the formation of arrays of silver nanoparticles by condensation on a cold substrate, the initial condensate is unstable. For the formation of stable arrays with a shape close to spherical, subsequent weak heat treatment is required. In this work the behavior of an array of silver nanoparticles during low-temperature annealing is shown. Using atomic force microscopy, the evolution of an array of silver nanoparticles formed on the SiO2 surface by vacuum-thermal evaporation onto an unheated substrate during in-situ heating to a temperature of 200°C is studied. A qualitative assessment of the effect of temperature on the geometry of nanoparticle arrays is obtained. It is experimentally shown that a sharp coarsening of silver nanoparticles and a decrease in their number on the surface take place in the narrow temperature range of 75 to 100°C, while in the temperature range of 100 to 200°C, there are no noticeable changes in the array of silver nanoparticles. After the statistical processing of the obtained data, the average size of the formed particles and their density per unit area at each stage of the experiment are determined. The corresponding dependences are obtained.



中文翻译:

在未加热的基板上通过真空-热蒸发获得的银纳米粒子阵列的几何参数的热稳定性

摘要

许多物质的纳米状态与块状状态明显不同。在冷的基底上通过冷凝形成银纳米颗粒阵列的过程中,初始冷凝物不稳定。为了形成形状接近球形的稳定阵列,需要随后的弱热处理。在这项工作中,显示了低温退火过程中银纳米颗粒阵列的行为。使用原子力显微镜,在SiO 2上形成的银纳米颗粒阵列的演化研究了在原位加热到200°C的过程中通过真空热蒸发将表面蒸发到未加热的基材上的过程。获得了温度对纳米颗粒阵列的几何形状的影响的定性评估。实验表明,在75至100°C的较窄温度范围内,银纳米颗粒急剧粗化并在表面上数量减少,而在100至200°C的温度范围内则没有明显的变化。银纳米粒子阵列的变化。对获得的数据进行统计处理后,确定在实验的每个阶段形成的颗粒的平均大小及其每单位面积的密度。获得了相应的依赖性。

更新日期:2021-01-28
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