Abstract

For modern information, measuring, and optoelectronic systems based on micro- and nanomechanical sensors of angular velocity and linear acceleration, it is important to ensure their stable functioning in the presence of external factors. The paper presents the results of a study of the effect of a random vibration on the characteristics of micromechanical accelerometers (MMAs) obtained using the LDS V455 vibration bench. The dependence of the spectral density of vibration acceleration on the frequency of one of the samples, intended for acceleration measurements in the range up to ±1.2 g, has a noticeable shift from its predetermined profile. To establish the reasons for this discrepancy, the design of the MMAs’ sensitive element (SE) under the effect of a random vibration is studied. Calculations and simulations are performed in the ANSYS program. The deformations of the MMAs’ SE along the sensitivity axis Z and the capacitance changes due to the acceleration and random vibration along the X, Y, and Z axes, taking into account the crystallographic orientation of the SE’s material (silicon) are determined. The effect of the crystallographic orientation of silicon used to manufacture the MMAs’ SE on the deformation (deflection) of the rotor is considered. The presented results of the theoretical and experimental studies, as well as computer modeling, coincide, which allows us to improve the design of the MMAs’ SE.

中文翻译：

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随机振动对微机械加速度计特性的影响研究

摘要

对于基于角速度和线性加速度的微米和纳米机械传感器的现代信息，测量和光电系统，重要的是要确保它们在存在外部因素的情况下稳定运行。本文介绍了随机振动对使用LDS V455振动台获得的微机械加速度计（MMA）特性的影响的研究结果。振动加速度的频谱密度与其中一个样本的频率的相关性，用于加速度测量的范围最大为±1.2 g与预定的配置文件相比有明显的变化。为了确定出现这种差异的原因，研究了在随机振动的影响下MMA的敏感元件（SE）的设计。计算和模拟在ANSYS程序中执行。MMA的SE沿灵敏度轴Z的变形以及电容的变化是由于沿X，Y和Z的加速度和随机振动引起的确定轴时要考虑到SE材料（硅）的晶体学取向。考虑了用于制造MMA的SE的硅的晶体取向对转子变形（挠度）的影响。理论和实验研究以及计算机建模的结果相吻合，这使我们可以改进MMA SE的设计。