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Spectrophotometric Monitoring of Chloride Electrolyte for the Electrochemical Deposition of Permalloy
Russian Microelectronics Pub Date : 2021-01-27 , DOI: 10.1134/s1063739720070136
R. D. Tikhonov , S. A. Polomoshnov , D. V. Kostuk

Abstract

The use of chloride electrolytes for the electrochemical deposition of the Ni81Fe19 permalloy is promising because sulfate electrolytes are unstable in the presence of sulfur. The magnetic properties of the Ni81Fe19 alloy are very sensitive to the deviation of the composition from the molar ratio of 4.26 between components. In this study, the accuracy of preparing the chloride electrolyte for the electrochemical deposition of a permalloy is controlled using spectrophotometry. Analysis of the spectra of light absorption and scattering by the iron hydroxide colloidal species of the electrolyte reveals that the electrolytic dissociation of bivalent iron and the mechanism of anomalous nickel and iron codeposition depend on the temperature and affect the electrochemical deposition of permalloy films. It is noted that the precipitation of ferrous hydroxide in the form of a colloidal species with boric acid as a complexing agent is a specific feature of ferrous chloride during hydrolysis. It is shown that, after filtrating iron chloride solution, nickel is precipitated from the chloride electrolyte better than iron. It is established that the normal congruent deposition of Ni81Fe19 alloy films takes place and abnormal codeposition is excluded.



中文翻译:

分光光度法监测坡莫合金电化学沉积的氯化物电解质

摘要

将氯化物电解质用于Ni 81 Fe 19坡莫合金的电化学沉积是有希望的,因为硫酸盐电解质在存在硫的情况下不稳定。Ni 81 Fe 19的磁性合金对成分与组分之间摩尔比为4.26的偏差非常敏感。在这项研究中,使用分光光度法控制制备用于坡莫合金电化学沉积的氯化物电解质的准确性。电解质的氢氧化铁胶体物质对光吸收和散射光谱的分析表明,二价铁的电解解离以及镍和铁共沉积异常的机理取决于温度并影响坡莫合金膜的电化学沉积。应当指出的是,以硼酸作为络合剂的胶态物质形式的氢氧化亚铁的沉淀是氯化亚铁在水解过程中的一个特殊特征。结果表明,过滤氯化铁溶液后,镍比氯化铁更好地从氯化物电解质中沉淀出来。可以确定镍的正常全同沉积发生了81个Fe 19合金膜,排除了异常共沉积。

更新日期:2021-01-28
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