Over the last couple of decades, the advancement in Microelectromechanical System (MEMS) devices is highly demanded for integrating the economically miniaturized sensors with fabricating technology. A sensor is a system that detects and responds to multiple physical inputs and converting them into analogue or digital forms. The sensor transforms these variations into a form which can be utilized as a marker to monitor the device variable. MEMS exhibits excellent feasibility in miniaturization sensors due to its small dimension, low power consumption, superior performance, and, batch-fabrication. This article presents the recent developments in standard actuation and sensing mechanisms that can serve MEMS-based devices, which is expected to revolutionize almost many product categories in the current era. The featured principles of actuating, sensing mechanisms and real-life applications have also been discussed. Proper understanding of the actuating and sensing mechanisms for the MEMS-based devices can play a vital role in effective selection for novel and complex application design.

在过去的几十年中，对于将经济上小型化的传感器与制造技术相集成的高机电系统（MEMS）器件提出了更高的要求。传感器是一种系统，它可以检测并响应多个物理输入，并将其转换为模拟或数字形式。传感器将这些变化转换​​为一种形式，可用作标记来监视设备变量。MEMS由于其尺寸小，功耗低，性能优越以及批量制造而在微型传感器中显示出极好的可行性。本文介绍了可用于基于MEMS的设备的标准致动和传感机制的最新进展，有望在当前时代彻底改变许多产品类别。促动的特色原则 还讨论了传感机制和现实生活中的应用。正确理解基于MEMS的设备的驱动和传感机制，对于有效选择新颖而复杂的应用设计至关重要。