The demand of high-speed wireless communication has increased, which need the data rate to be in the order of Terabyte per second (Tbps) in the near future. Terahertz (THz) band communication is a key wireless communication technology to satisfy this future demand. This would also reduce the spectrum scarcity and capacity limitation of current wireless systems. Microfabricated Folded Waveguide TWTs are the potential compact sources of wide band and high-power terahertz radiation. This study primarily focuses on machining technology for THz waveguide components requiring ultra-high precision micromachining. Rectangular waveguides, especially Folded Waveguides (FW), are even more difficult to manufacture using conventional machining techniques due to their small size and very tight tolerances. The criticalities in micromachining of FW for 0.22 THz have been addressed in this article. Half hard free cutting Brass IS 319-H₂ was used as a work material due to its electrical and mechanical properties. Waveguide size of 0.852 × 0.12 mm was machined within ± 3–5 μm linear tolerances, surface roughness in the order of 45 nm R_a, and flatness less than half of wavelength (< λ/2). The split top and bottom blocks of the folded waveguide were aligned by dowel pins which matched within a tolerance of ± 5 μm. The perpendicularity and parallelism were maintained within 5 μm tolerance. This work explored and established the application of micromilling as reasonably suitable for the THz waveguides followed by ultrasonic cleaning as deburring. It also investigated the measured folded waveguide losses which were close to simulated values.

高速无线通信的需求已经增加，这需要在不久的将来将数据速率定为每秒TB级。太赫兹（THz）频段通信是满足这一未来需求的关键无线通信技术。这还将减少当前无线系统的频谱稀缺性和容量限制。超细折叠波导TWT是宽带和高功率太赫兹辐射的潜在紧凑型光源。这项研究主要集中于需要超高精度微加工的太赫兹波导组件的加工技术。矩形波导，尤其是折叠式波导（FW），由于尺寸小且公差非常严格，因此使用常规加工技术制造起来甚至更加困难。FW的微加工的临界值为0。本文已解决了22 THz。半硬式易切削黄铜IS 319-H由于其电气和机械性能，图₂用作工作材料。在±3–5μm的线性公差，大约45 nm R _a的表面粗糙度和小于波长一半（< λ / 2）的平坦度范围内，加工了0.852×0.12 mm的波导尺寸。折叠后的波导的顶部和底部分隔块通过定位销对齐，定位销的公差在±5μm之内。垂直度和平行度保持在5μm的公差范围内。这项工作探索并建立了适用于太赫兹波导的微铣削的应用，然后进行超声波清洗以去除毛刺。它还研究了测得的折叠波导损耗，该损耗接近模拟值。