Phase-shifting fringe analysis using wavelength scanning has been broadly applied to the interferometric profiling of the thickness variation of glass plates. However, the nonlinear phase shifting can cause bias error during wavelength scanning. In this study, the bias error in the calculated phase was formulated by Taylor series expansion. Using the formulation, a novel 15-sample algorithm of a partially negative window was derived to enable compensation for the bias phase error. The new 15-sample algorithm was visualized by the algorithm polynomial on the complex plane and Fourier description in the frequency domain. The bias error suppression capability of the developed algorithm was examined by using the numerical simulation. Finally, the proposed algorithm was used in conjunction with a large-aperture Fizeau interferometer to examine the thickness variation of a glass parallel plate.

使用波长扫描的相移条纹分析已广泛应用于玻璃板厚度变化的干涉分析。但是，非线性相移会在波长扫描过程中引起偏置误差。在这项研究中，计算阶段的偏差由泰勒级数展开表示。使用该公式，推导了部分负窗口的新型15样本算法，可以补偿偏置相位误差。新的15样本算法通过复平面上的算法多项式和频域中的傅立叶描述来可视化。通过数值模拟，检验了所开发算法的偏置误差抑制能力。最后，