Study of aerodynamic focusing lens stacks (ALS) for long focal length aerosol-assisted focused chemical vapor deposition (AAFCVD),RSC Advances

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Study of aerodynamic focusing lens stacks (ALS) for long focal length aerosol-assisted focused chemical vapor deposition (AAFCVD)
RSC Advances ( IF 3.9 ) Pub Date : 2021-1-22 , DOI: 10.1039/d0ra08447f
Han Lun Lu ₁ , Lei Li ₂ , Xi Hui Liang ₁ , Jun Jun Wang ₁ , Ning Yang Liu ₁ , Zhi Tao Chen ₁

Affiliation

Mask-free direct printing can alleviate the high cost and high consumption involved in photo-lithography for chip processing. Most of their technical routes are based on the traditional short focal length nozzles, which is suffered from higher probability of nozzle retardation or clogging as well as the higher mechanical burdens. While aerosol-assisted chemical vapor deposition (AACVD) has better deposition adaptability but usually lack of focused printing. In this study, a system that combines of long focal length ALS with AACVD, so called AAFCVD printing system has been developed. The single-point printing capability and aerosol precursor adaptability were verified, and the relationship between the single spot printing performance and the chemical reaction mechanisms were studied. Furthermore, a unique carbon injection effect brought by ALS was discovered. Finally, the linear graphics printing performances of the system were evaluated. This system is expected to become a new generation of high-performance mask-free printing system for chip manufacturing.

中文翻译：

用于长焦距气溶胶辅助聚焦化学气相沉积 (AAFCVD) 的气动聚焦透镜组 (ALS) 研究

免掩模直接印刷可以减轻芯片加工光刻的高成本和高消耗。他们的技术路线大多基于传统的短焦距喷嘴，存在喷嘴延迟或堵塞的可能性较高以及机械负担较高的问题。虽然气溶胶辅助化学气相沉积（AACVD）具有更好的沉积适应性，但通常缺乏聚焦打印。在这项研究中，开发了一种将长焦距 ALS 与 AACVD 相结合的系统，即所谓的 AAFCVD 打印系统。验证了单点打印能力和气溶胶前驱体适应性，研究了单点打印性能与化学反应机理的关系。此外，发现了ALS带来的独特的注碳效应。最后，对系统的线性图形打印性能进行了评估。该系统有望成为新一代芯片制造的高性能免掩模印刷系统。

更新日期：2021-01-22

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