This paper reports a rate integrating gyroscope (RIG) using independently controlled clockwise (CW) and counter clockwise (CCW) modes on a single MEMS resonator. The rotation angle is read out by the phase difference between these modes. A CW/CCW mode separator was used to independently contol these modes superposed on the resonator. The frequency and Q-factor mismatches were compensated by the phases and amplitudes of driving signals. A control system including the mode separator, feedback controllers, signal generators, mismatch compensators were implemented in a field programmable gate array (FPGA). Using the proposed mismatch compensation technique, the equivallent aniso-damping term became 1/100. As a result, the scale factor became constant and the non-linearity became less than 0.2% even when the slow angular rate region around 5°/s. In addition, the temperature coefficient of scale factor as small as −1.84 ± 0.62 ppm/K was achieved without any temperature correction. [2020-0011]

中文翻译：

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在单个谐振器上使用独立控制的 CW 和 CCW 模式的速率积分陀螺仪

本文报告了在单个 MEMS 谐振器上使用独立控制的顺时针 (CW) 和逆时针 (CCW) 模式的速率积分陀螺仪 (RIG)。通过这些模式之间的相位差读出旋转角。CW/CCW 模式分离器用于独立控制叠加在谐振器上的这些模式。频率和 Q 因子失配通过驱动信号的相位和幅度进行补偿。在现场可编程门阵列 (FPGA) 中实现了包括模式分离器、反馈控制器、信号发生器、失配补偿器在内的控制系统。使用建议的失配补偿技术，等效的各向异性阻尼项变为 1/100。结果，即使在 5°/s 左右的慢角速率区域时，比例因子也变得恒定并且非线性度变得小于 0.2%。此外，比例因子的温度系数小至 -1.84 ± 0.62 ppm/K，无需任何温度校正。[2020-0011]