We present the design, modeling, fabrication, and experimental characterization of an electrodynamic wireless power transmission (EWPT) receiver for low-frequency (< 1 kHz), near-field wireless power transmission. The device utilizes a bulk-micromachined silicon serpentine suspension, two NdFeB magnets and two precision-manufactured coils. The architecture of the transducer is designed to maximize the electrodynamic coupling coefficient while maintaining a low mechanical resonant frequency in order to maximize the power density for low-frequency wireless power transmission. An equivalent lumped-element circuit model is established to parameterize the system and to predict the output performance of the proposed system. A prototype device is fabricated, assembled and tested, and the results are compared with the model prediction. The 0.31 cm³ device generates 2.46 mW average power (7.9 mW $\cdot $ cm⁻³ power density) at 4 cm distance from a transmitter coil operating at 821 Hz and safely within allowable human exposure limits. This data corresponds to a normalized power density of 21.9 mW $\cdot $ cm $^{-3}\,\,\cdot $ mT⁻², which is 44% higher than similar reported devices. Based on these results, this device shows great suitability for wirelessly charging mobile, wearable and bio-implantable devices. [2020-0161]

中文翻译：

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使用微机械硅悬架的微型电动无线电力传输接收器

我们介绍了用于低频 (< 1 kHz) 近场无线电力传输的电动无线电力传输 (EWPT) 接收器的设计、建模、制造和实验表征。该设备采用大块微加工硅蛇纹石悬架、两个 NdFeB 磁铁和两个精密制造的线圈。换能器的架构旨在最大限度地提高电动耦合系数，同时保持较低的机械谐振频率，以最大限度地提高低频无线电力传输的功率密度。建立等效的集总元件电路模型来参数化系统并预测所提出系统的输出性能。制造、组装和测试原型设备，并将结果与​​模型预测进行比较。0.31 厘米³设备产生 2.46 mW 平均功率（7.9 mW $\cdot $ cm ^-3功率密度）距离以 821 Hz 运行的发射器线圈 4 cm 且安全地处于人体允许的暴露限值内。该数据对应于 21.9 mW 的归一化功率密度 $\cdot $ 厘米 $^{-3}\,\,\cdot $ mT ^-2，比类似报道的设备高 44%。基于这些结果，该设备非常适合为移动、可穿戴和生物植入设备进行无线充电。[2020-0161]