This article reports on the first demonstration of a high resolution (~1.9 nW/Hz^1/2 measured in 200 Hz bandwidth) and fast (~5.3 ms) uncooled Infrared (IR) detector based on a high frequency (172 MHz) aluminum nitride nano-plate piezoelectric fishnet-like metasurface (PFM). For the first time, an ultrathin (650 nm) piezoelectric fishnet-like metasurface is employed to form the vibrating body of a nanoelectromechanical resonator with a unique combination of optical, thermal and electromechanical properties. Sensing and actuation of a high frequency and high electromechanical performance (quality factor, $Q\sim 2254$ and electromechanical coupling coefficient, $k_{t}^{2}\sim 1.4$ %) bulk acoustic mode of vibration in the free-standing ultrathin structure is achieved thanks to the superior piezoelectric transduction properties of the proposed metasurface. Strong absorption (60%) of mid wavelength infrared (MWIR) radiation in the ultra-low volume resonant device is obtained thanks to the properly engineered optical properties of the fishnet-like metasurface which provide multiple plasmonic resonances at 3- $5~\mu \text{m}$ to the structure. The demonstrated resonant PFM detector technology marks a milestone towards the implementation of a new class of high performance, miniaturized and low power MWIR imaging systems.

中文翻译：

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基于氮化铝压电鱼网超表面的非制冷红外探测器

本文报告了基于高频 (172 MHz) 氮化铝的高分辨率（~1.9 nW/Hz ^1/2在 200 Hz 带宽下测量）和快速（~5.3 ms）非制冷红外 (IR) 探测器的首次演示纳米板压电鱼网状超表面（PFM）。首次采用超薄（650 nm）压电渔网状超表面来形成具有光学、热和机电特性的独特组合的纳米机电谐振器的振动体。高频和高机电性能（品质因数、 $Q\sim 2254$ 和机电耦合系数， $k_{t}^{2}\sim 1.4$ %) 由于所提出的超表面具有优异的压电转换特性，因此在独立式超薄结构中实现了体声波振动模式。由于渔网状超表面的适当设计的光学特性，在 3- 处提供多个等离子体共振，因此在超低体积共振装置中获得了对中波长红外 (MWIR) 辐射的强吸收 (60%)。 $5~\mu \text{m}$ 到结构。所展示的谐振 PFM 探测器技术标志着实现新型高性能、小型化和低功率 MWIR 成像系统的里程碑。