Microfluidic technologies are used to precisely manipulate fluid flow to integrate solution-processed materials in semiconductor devices. Here, a microfluidic method for incorporating perovskite into semiconductor-based devices is developed by embedding perovskite microwires (MWs) in Si microchannel platforms. The method relies on pumping a solution containing perovskite from the source to be precisely injected into Si microchannel arrays using filter paper that acts as a mesh of nano-/micropumps, owing to the capillary forces. Mask-free laser interference lithography is used to fabricate Si microchannels. Advanced characterization demonstrates that high-quality MWs are confined perfectly within the microchannel platform. Theoretical simulation is used to study the microfluidic mechanism. A high-performance photodetector based on the perovskite/Si MW array is obtained. Owing to this method’s simplicity, low cost, and zero chemical waste, it could pave the way for manufacturing cost-effective miniaturized perovskite in semiconductor platforms for a wide range of applications, including lab-on-a-chip technology.

微流体技术用于精确控制流体流动，以将溶液处理后的材料集成到半导体器件中。在这里，通过将钙钛矿微丝（MWs）嵌入到Si微通道平台中，开发了一种将钙钛矿并入基于半导体的器件的微流体方法。该方法依赖于从毛细管源中泵入含有钙钛矿的溶液，然后使用作为纳米/微泵网眼的滤纸将其精确注入到硅微通道阵列中。无掩模激光干涉光刻用于制造Si微通道。先进的特性表明，高质量的MW被完美地限制在微通道平台内。理论模拟用于研究微流控机理。获得了一种基于钙钛矿/ Si MW阵列的高性能光电探测器。由于该方法的简便性，低成本和零化学浪费，它可以为在包括晶片实验室技术在内的广泛应用的半导体平台中制造经济高效的微型钙钛矿铺平道路。