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Templated fingering during solid state dewetting
Acta Materialia ( IF 8.3 ) Pub Date : 2021-01-20 , DOI: 10.1016/j.actamat.2021.116669
Yoon Ah Shin , Carl V. Thompson

Solid thin films formed on substrates are normally metastable in the as-deposited state and will dewet via capillarity-driven surface self-diffusion when heated, while remaining in the solid state. Solid state dewetting proceeds through retraction of film edges that develop rims that either pinch-off to form wires that run parallel to the retracting edges or breakdown to develop fingers that propagate into the films. We have investigated the mechanisms that lead to fingering instead of pinch-off using lithographically patterned single-crystal Ni(110) films formed on MgO. We find that fingering tends to occur when edges are initially rough and demonstrate that fingering can be induced by lithographically pre-patterning film edges with periodic roughness. We also find that periodic roughness provides a template that controls the steady state finger spacing and leads to the formation of periodic arrays of parallel wires. Templated fingering was investigated in films patterned into rectangular patches with a wide range of experimental variables; roughness period (16 different values, 2.7 μm - 12.5 μm); edge orientation (20o, 33o and 45o with respect to [11¯0]); and film thickness (90, 120 and 150 nm). For each of these experimental variables, the finger spacing, propagation direction, and propagation rate was determined. A model based on mechanisms that control the rate of finger propagation is developed and shown to be consistent with the measured propagation rates over the wide range of experimental conditions that were investigated.



中文翻译:

固态去湿时的模板指法

在基板上形成的固态薄膜通常在沉积状态下是亚稳态的,在加热时会通过毛细作用驱动的表面自扩散而润湿,而保持固态。固态去湿通过薄膜边缘的回缩来进行,所述薄膜边缘会缩回以形成边缘,所述边缘会折断以形成平行于缩回边缘的金属丝,或者会破裂而形成会扩散到薄膜中的指状物。我们已经研究了使用形成在MgO上的光刻图案化单晶Ni(110)薄膜导致指尖而不是夹断的机制。我们发现,当边缘最初很粗糙时,往往会出现指法现象,并证明可以通过对具有周期性粗糙度的膜边缘进行光刻预图案化来诱导指法。我们还发现,周期性粗糙度提供了控制稳态手指间距的模板,并导致形成平行线的周期性阵列。模板指法已在图案化为矩形补丁的胶片中进行了研究,并具有广泛的实验变量。粗糙度周期(16个不同值,2.7μm-12.5μm); 边缘方向(20Ò,33 ö和45 ö相对于[1个1个¯0]); 和膜厚度(90、120和150 nm)。对于这些实验变量中的每一个,都确定了手指间距,传播方向和传播速率。建立了基于控制手指传播速率的机制的模型,该模型显示出与所研究的广泛实验条件下测得的传播速率一致。

更新日期:2021-01-31
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