This article deals with surface loss on quartz of atomic hydrogen (H) and its isotope deuterium (D) in a low-pressure (10Pa) pulsed inductively coupled plasma. The atomic temporal decay in the post discharge is measured by two-photon absorption laser-induced fluorescence (TALIF). From the loss rate, the atomic surface loss probability is determined. In pure hydrogen or pure deuterium gas, no isotopic effect on surface kinetics has been observed and the surface loss probabilities of H and D were found to be almost identical and equal to ∼1.8%. However, despite the lack of difference in surface loss probability, a net isotopic effect on surface loss rate due to the mass difference between the isotopes is measured. Hydrogen atoms diffuse faster and have higher flux to the plasma chamber walls than deuterium atoms. Hydrogen atoms are therefore lost at higher rate than deuterium atoms. Based on the observed isotopic difference and on the comparison between H and D TALIF signals, the isotopic effects on H and D atom production are discussed.

本文讨论了在低压（10Pa）脉冲感应耦合等离子体中原子氢（H）及其同位素氘（D）在石英上的表面损失。后放电中原子的时间衰减是通过双光子吸收激光诱导的荧光（TALIF）测量的。根据损失率，确定原子表面损失概率。在纯氢或纯氘气体中，未观察到同位素对表面动力学的影响，并且发现H和D的表面损失几率几乎相同，约等于1.8％。然而，尽管缺乏表面损失几率的差异，但仍测量了由于同位素之间的质量差异而对表面损失率产生的净同位素效应。氢原子比氘原子扩散得更快，并且通向等离子体室壁的通量更高。因此，氢原子的损失速率比氘原子高。基于观察到的同位素差异以及H和D TALIF信号之间的比较，讨论了同位素对H和D原子产生的影响。