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Enhanced NH3 and H2 gas sensing with H2S gas interference using multilayer SnO2/Pt/WO3 nanofilms
Journal of Hazardous Materials ( IF 12.2 ) Pub Date : 2021-01-19 , DOI: 10.1016/j.jhazmat.2021.125181
Nguyen Van Toan , Chu Manh Hung , Nguyen Duc Hoa , Nguyen Van Duy , Dang Thi Thanh Le , Nguyen Thi Thu Hoa , Nguyen Ngoc Viet , Phan Hong Phuoc , Nguyen Van Hieu

The selective detection and classification of NH3 and H2S gases with H2S gas interference based on conventional SnO2 thin film sensors is still the main problem. In this work, three layers of SnO2/Pt/WO3 nanofilms with different WO3 thicknesses (50, 80, 140, and 260 nm) were fabricated using the sputtering technique. The WO3 top layer were used as a gas filter to further improve the selectivity of sensors. The effect of WO3 thickness on the (NH3, H2, and H2S) gas-sensing properties of the sensors was investigated. At the optimal WO3 thickness of 140 nm, the gas responses of SnO2/Pt/WO3 sensors toward NH3 and H2 gases were slightly lower than those of Pt/SnO2 sensor film, and the gas response of SnO2/Pt/WO3 sensor films to H2S gas was almost negligible. The calcification of NH3 and H2 gases was effectively conducted by machine learning algorithms. These evidences manifested that SnO2/Pt/WO3 sensor films are suitable for the actual NH3 detection of NH3 and H2S gases.



中文翻译:

使用多层SnO 2 / Pt / WO 3纳米膜增强H 2 S气体干扰下的NH 3和H 2气体感测

主要的问题仍然是基于传统的SnO 2薄膜传感器对具有H 2 S气体干扰的NH 3和H 2 S气体进行选择性检测和分类。在这项工作中,使用溅射技术制造了三层具有不同WO 3厚度(50、80、140和260 nm)的SnO 2 / Pt / WO 3纳米膜。WO 3顶层用作气体过滤器,以进一步提高传感器的选择性。WO 3厚度对(NH 3,H 2和H 2的影响S)研究了传感器的气敏特性。在最佳WO 3厚度为140 nm时,SnO 2 / Pt / WO 3传感器对NH 3和H 2气体的气体响应略低于Pt / SnO 2传感器膜的气体响应,而SnO 2 /对于H 2 S气体,Pt / WO 3传感器膜几乎可以忽略不计。通过机器学习算法可以有效地进行NH 3和H 2气体的钙化。这些证据表明,SnO 2 / Pt / WO 3传感器膜适合实际的NH 3检测NH 3和H 2 S气体。

更新日期:2021-01-19
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