Piezoelectricity in ferroelectrics arises from electrostriction biased by their spontaneous polarisation, which can be enhanced through a bias-induced polarisation. Doing so, the piezoelectric response can be tuned and significantly enhanced. In this study, the ferroelectric polymer P(VDF-TrFE) was used to electro-mechanically excite a silicon microcantilever. Using this device, we demonstrate that a bias-induced polarisation improves the piezoelectric response of P(VDF-TrFE). To distinguish between the linear piezoelectric and quadratic electrostrictive effect, lock-in measurements were performed in order to separate the characteristic frequency response of both electro-mechanical phenomena. This work shows the potential for MEMS devices having controllable actuating and sensing properties.

铁电体中的压电是由其自发极化引起的电致伸缩引起的，该电致伸缩可以通过偏置引起的极化来增强。这样做，可以调整压电响应并显着增强压电响应。在这项研究中，铁电聚合物P（VDF-TrFE）用于机电激发硅微悬臂梁。使用该设备，我们证明了偏激极化改善了P（VDF-TrFE）的压电响应。为了区分线性压电效应和二次电致伸缩效应，执行了锁定测量，以分离两种机电现象的特征频率响应。这项工作表明了具有可控制的致动和传感特性的MEMS器件的潜力。