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Large bias-induced piezoelectric response in the ferroelectric polymer P(VDF-TrFE) for MEMS resonators
Materials Research Letters ( IF 8.6 ) Pub Date : 2021-01-17 , DOI: 10.1080/21663831.2020.1868593
Jonas Hafner 1 , Marco Teuschel 1 , Davide Disnan 1 , Michael Schneider 1 , Ulrich Schmid 1
Affiliation  

Piezoelectricity in ferroelectrics arises from electrostriction biased by their spontaneous polarisation, which can be enhanced through a bias-induced polarisation. Doing so, the piezoelectric response can be tuned and significantly enhanced. In this study, the ferroelectric polymer P(VDF-TrFE) was used to electro-mechanically excite a silicon microcantilever. Using this device, we demonstrate that a bias-induced polarisation improves the piezoelectric response of P(VDF-TrFE). To distinguish between the linear piezoelectric and quadratic electrostrictive effect, lock-in measurements were performed in order to separate the characteristic frequency response of both electro-mechanical phenomena. This work shows the potential for MEMS devices having controllable actuating and sensing properties.



中文翻译:

MEMS谐振器中铁电聚合物P(VDF-TrFE)中的大偏置感应压电响应

铁电体中的压电是由其自发极化引起的电致伸缩引起的,该电致伸缩可以通过偏置引起的极化来增强。这样做,可以调整压电响应并显着增强压电响应。在这项研究中,铁电聚合物P(VDF-TrFE)用于机电激发硅微悬臂梁。使用该设备,我们证明了偏激极化改善了P(VDF-TrFE)的压电响应。为了区分线性压电效应和二次电致伸缩效应,执行了锁定测量,以分离两种机电现象的特征频率响应。这项工作表明了具有可控制的致动和传感特性的MEMS器件的潜力。

更新日期:2021-01-18
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