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The investigation of current condition mechanism of Al/Y2O3/p-Si Schottky barrier diodes in wide range temperature and illuminate
Microelectronics Reliability ( IF 1.6 ) Pub Date : 2021-01-18 , DOI: 10.1016/j.microrel.2021.114040
Ömer Sevgili , İkram Orak

Yttrium oxide (Y2O3) powder was used as an interface layer between metal (Al) and semiconductor (p-Si). Y2O3 powder was coated with a spin-coating method on the p-Si and the Al/Y2O3/p-Si Schottky Barrier Diodes (SBD) was fabricated. The electrical characteristics of the fabricated SBD were analyzed at various temperatures and compared with each other. While ΦB0 decrease from 0.931 eV to 0.211 eV, n increased from 1.63 to 10.07 with decreasing temperature ranging from 340 K to 60 K. The Richardson constant (A) value obtained experimentally for the Al/Y2O3/p-Si SBD was founded as very close to the theoretical A value of p-Si. Photoconductivity mechanism (PM) of the Al/Y2O3/p-Si SBD was examined by using the photocurrent and the illuminating intensity at −1 V and it was seen that it had a nonlinear behavior. Additionally, the structural and morphologic properties of pure-Y2O3 were analyzed by using X-Rays Diffraction (XRD), Scanning Electron Microscopy (SEM), and Raman spectroscopy (Raman). The fabricated Al/Y2O3/p-Si SBD can be used as a photodiode application in various electronic and optoelectronic technologies.



中文翻译:

Al / Y 2 O 3 / p-Si肖特基势垒二极管在大范围温度和照明条件下的电流条件机理研究

氧化钇(Y 2 O 3)粉末用作金属(Al)和半导体(p-Si)之间的界面层。将Y 2 O 3粉末通过旋涂法涂覆在p-Si上,并且制造Al / Y 2 O 3 / p-Si肖特基势垒二极管(SBD)。在各种温度下分析了制成的SBD的电特性,并进行了比较。而Φ B0减少从0.931 EV至0.211伏特,正从1.63增加至10.07随着温度范围从340 K至60 K的理查森常数(A 用于铝/实验获得的)值Y 2 ö 3/ p-Si SBD的建立非常接近于p-Si的理论A⁎值。通过使用光电流和-1 V下的照明强度检查了Al / Y 2 O 3 / p-Si SBD的光电导机理(PM),发现它具有非线性行为。此外,通过使用X射线衍射(XRD),扫描电子显微镜(SEM)和拉曼光谱(Raman)分析了纯Y 2 O 3的结构和形态特性。制成的Al / Y 2 O 3 / p-Si SBD可用作各种电子和光电技术中的光电二极管应用。

更新日期:2021-01-18
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