Scanning electron microscopy shows that the microstructure, in particular the overall grain size, of chemical vapor deposited silicon carbide coatings depends on the deposition temperature. So far, the influence of the microstructure on the mechanical properties of such coatings is not well described in literature. To investigate the influence of the deposition temperature on the mechanical properties of the coating, nanoindentation is used in this work. Since the measurement results of nanoindentation can be affected by the substrate material, the contribution of the substrate material is taken into account utilizing a finite element model. The model is then employed to generate information about elastic and plastic properties of the coating by inverse simulation. To evaluate the fracture toughness of the coating, the generated material model is used in a cohesive-zone based formulation of the fracture process during indentation at higher loads. The results of this model allow determining the fracture toughness of silicon carbide coatings deposited at different temperatures.

扫描电子显微镜显示化学气相沉积的碳化硅涂层的微观结构，特别是总晶粒尺寸，取决于沉积温度。迄今为止，文献中没有很好地描述微观结构对这种涂层的机械性能的影响。为了研究沉积温度对涂层机械性能的影响，在这项工作中使用了纳米压痕。由于纳米压痕的测量结果会受到基材的影响，因此，利用有限元模型考虑了基材的贡献。然后使用该模型通过逆仿真生成有关涂层的弹性和塑性特性的信息。为了评估涂层的断裂韧性，生成的材料模型用于在较高载荷下压痕过程中基于内聚区的断裂过程公式。该模型的结果可以确定在不同温度下沉积的碳化硅涂层的断裂韧性。