This study examines the development of a “dual-crankshaft out-of-phase balanced drive mechanism” and its application in the realization of high-frequency scraping in the production of highly precise, extremely dense microconcavity patterns. The high-density microcavity mold can produce micro-lens arrays, which achieve energy saving through the light-gathering effect. A monocrystalline diamond tool driven by the designed positive drive mechanism facilitates scraping at a high-frequency using positively reciprocated motion. To inhibit system vibration caused by a single crankshaft, a dual-crankshaft out-of-phase balanced drive mechanism is developed, which allows both the primary drive shaft and balance shaft to possess identical eccentric distance with their eccentric forces going in opposite directions. The design offsets the eccentric force made by revolution of the primary drive shaft against the simultaneous force made by the revolving balance shaft. Experiments show that when system vibration error is restrained to 1-μm, the single crankshaft tool reaches a drive frequency of 15 Hz. While under the dual-crankshaft out-of-phase setup, drive frequency reached up to 50 Hz. Further experimental results demonstrated that the dual-crankshaft out-of-phase balanced drive mechanism has the capability of scraping a vast microconcavity pattern with high-precision, -integrity and -consistency. Characteristic surface roughness of microcavities was below Ra 0.024 μm and feature edges were burr-free. In addition, this paper discusses in detail: the material shear rate, scraping force prediction, influences of the workpiece forward feed-rate and tool actuation frequency as well as the relationship between major and minor axes in microconcavity formation.

本研究探讨了“双曲轴异相平衡驱动机构”的发展及其在生产高精度，高密度微凹模的高频刮削中的应用。高密度微腔模具可以生产微透镜阵列，通过聚光效果实现节能。由设计的正向驱动机构驱动的单晶金刚石工具可通过正向往复运动促进高频刮削。为了抑制由单个曲轴引起的系统振动，开发了双曲轴异相平衡驱动机构，该机构允许主驱动轴和平衡轴具有相同的偏心距，并且它们的偏心力沿相反的方向进行。该设计抵消了主驱动轴旋转产生的偏心力与旋转平衡轴产生的同时力。实验表明，当系统振动误差限制为1μm时，单个曲轴工具的驱动频率为15 Hz。在双曲轴异相设置下，驱动频率达到50 Hz。进一步的实验结果表明，双曲轴异相平衡驱动机构具有能够以高精度，完整性和一致性刮擦巨大的微凹坑图案的能力。微腔的特征表面粗糙度低于Ra 0.024μm，特征边缘无毛刺。此外，本文还详细讨论了：材料剪切速率，刮擦力预测，