This paper presents a quick and straightforward method to evaluate image distortion in scanning electron microscopy using a certified reference material (CRM) as a test specimen. The CRM has a square dot-array structure, whose dot-pitch has an accredited value. By calculating the distance between each dot of the CRM via image analysis, we can detect the distortion in the image as variations of dot interval. Furthermore, by considering the uncertainty of the certified value, it is possible to quantitatively evaluate the significance of the distortion in the image. This method enables us to easily estimate the uncertainty from image distortion, which can improve the reliability of measurement by scanning electron microscopy.

中文翻译：

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使用基于点阵列的认证参考材料评估 SEM 中的图像失真

本文介绍了一种使用认证参考材料 (CRM) 作为测试样本来评估扫描电子显微镜中的图像失真的快速且直接的方法。CRM 具有方形点阵结构，其点距具有认可值。通过图像分析计算CRM的每个点之间的距离，我们可以将图像中的失真检测为点间距的变化。此外，通过考虑认证值的不确定性，可以定量评估图像失真的重要性。这种方法使我们能够轻松估计图像失真的不确定性，从而提高扫描电子显微镜测量的可靠性。