Thermal properties of the magnetron discharge with uncooled copper and chromium targets were studied experimentally and theoretically for DC and long HiPIMS (L-HiPIMS) operation modes. A set of thermal fluxes was considered to build a numerical model of the hot target exposed to DC and high-power pulsed plasma. The modeling results were tested in the experiments. The temperature of targets was measured directly in course of magnetron discharge operation with an elaborated contact thermocouple method. The measurements were made in two modes. At first the temporal evolution of temperature was recorded for a fixed applied discharge power. The results were found to well agree with temperature values expected from calculations. At 2 kW power, it takes ~50 s to reach the melting point of copper. The steady-state temperature values were also measured for a number of discharge power levels. The obtained dependence clearly demonstrated that the main mechanisms of the target heat balance at high temperatures are surface radiation and heat transfer due to thermal conductivity of the heat insulation supports between the target and water-cooled cathode. The parameters of DC hot target magnetron were compared to the high-power pulsed regime with the pulse-on time 20 ms. A promising method of a hot target magnetron discharge operation was considered that involves applying long (>20 ms) high-power pulses to the target pre-heated in the DC mode during the pulse-off period.

对于直流和长时间HiPIMS（L-HiPIMS）操作模式，通过实验和理论研究了具有未冷却铜和铬靶的磁控管放电的热性能。考虑使用一组热通量来建立暴露于DC和高功率脉冲等离子体的热靶的数值模型。在实验中测试了建模结果。目标的温度是在磁控管放电操作过程中直接采用精密接触热电偶方法测量的。测量以两种模式进行。首先，记录固定施加的放电功率的温度随时间的变化。发现结果与计算预期的温度值非常吻合。在2 kW功率下，大约需要50 s才能达到铜的熔点。还针对多个放电功率水平测量了稳态温度值。所获得的依赖性清楚地表明，由于靶和水冷阴极之间的绝热载体的导热性，高温下靶热平衡的主要机理是表面辐射和热传递。将直流热靶磁控管的参数与脉冲开启时间为20 ms的高功率脉冲状态进行比较。考虑到一种有希望的热目标磁控管放电操作方法，该方法涉及在脉冲关闭期间向DC模式下预热的目标施加较长（> 20 ms）的高功率脉冲。所获得的依赖性清楚地表明，由于靶和水冷阴极之间的绝热载体的导热性，高温下靶热平衡的主要机理是表面辐射和热传递。将直流热靶磁控管的参数与脉冲开启时间为20 ms的高功率脉冲状态进行比较。考虑到一种有希望的热目标磁控管放电操作方法，该方法涉及在脉冲关闭期间向DC模式下预热的目标施加较长（> 20 ms）的高功率脉冲。所获得的依赖性清楚地表明，由于靶和水冷阴极之间的绝热载体的导热性，高温下靶热平衡的主要机理是表面辐射和热传递。将直流热靶磁控管的参数与脉冲开启时间为20 ms的高功率脉冲状态进行比较。考虑了一种有希望的热目标磁控管放电操作方法，该方法涉及在脉冲关闭期间向DC模式下预热的目标施加较长（> 20 ms）的高功率脉冲。