A comprehensive review of the modeling approaches used to simulate the behaviors of micro/nano-gyroscopes is presented. The performance and sensitivity of these inertial sensors can be significantly improved through understanding their governing dynamics and exploiting specific phenomena and distinctive features. Such understanding can be developed by solving and analyzing their governing equations and boundary conditions that may comprise a set of highly nonlinear partial differential equations. The operating principle of vibrating beam gyroscopes is described and their main actuation and sensing mechanisms are reviewed and discussed. The multi-fidelity modeling approaches that have been used for the design, performance analysis, and control of vibratory micro/nano-gyroscopes are consolidated and reviewed. The use of these mathematical models has opened doors for the development of new sensing designs with unprecedented sensitivity and extended operating range. To date, extensive research has been conducted on modeling and simulations of micro/nano-gyroscopes. However, several open research topics have not been thoroughly explored yet. These include nanoscale experimentation for model validation, damage/fatigue modeling, and self-powered energy harvesting gyroscope systems. This review presents the current state of the art and highlights promising research directions for continued technological advancement of micro/nano-gyroscopes.

介绍了用于模拟微/纳米陀螺仪行为的建模方法的全面综述。通过了解惯性传感器的控制动力学并利用特定现象和独特功能，可以显着提高这些惯性传感器的性能和灵敏度。可以通过解决和分析它们的控制方程和边界条件（包括一组高度非线性的偏微分方程）来建立这种理解。描述了振动式陀​​螺仪的工作原理，并对其主要的致动和传感机制进行了回顾和讨论。整合和审查了用于振动微型/纳米陀螺仪的设计，性能分析和控制的多保真度建模方法。这些数学模型的使用为开发具有前所未有的灵敏度和扩展的工作范围的新型传感设计打开了大门。迄今为止，已经对微型/纳米陀螺仪的建模和仿真进行了广泛的研究。但是，尚未完全探索几个开放的研究主题。其中包括用于模型验证的纳米级实验，损伤/疲劳建模以及自供电的能量收集陀螺仪系统。这篇综述介绍了当前的技术现状，并着重指出了微/纳米陀螺仪持续技术发展的有前途的研究方向。但是，尚未完全探索几个开放的研究主题。其中包括用于模型验证的纳米级实验，损伤/疲劳建模以及自供电的能量收集陀螺仪系统。这篇综述介绍了当前的技术现状，并着重指出了微/纳米陀螺仪持续技术发展的有前途的研究方向。但是，尚未完全探索几个开放的研究主题。其中包括用于模型验证的纳米级实验，损伤/疲劳建模以及自供电的能量收集陀螺仪系统。这篇综述介绍了当前的技术水平，并重点介绍了微/纳米陀螺仪的持续技术发展的有前途的研究方向。