Electron and ion beams are indispensable tools in numerous fields of science and technology, ranging from radiation therapy to microscopy and lithography. Advanced beam control facilitates new functionalities. Here, we report the guiding and splitting of charged particle beams using ponderomotive forces created by the motion of charged particles through electrostatic optics printed on planar substrates. Shape and strength of the potential can be locally tailored by the lithographically produced electrodes’ layout and the applied voltages, enabling the control of charged particle beams within precisely engineered effective potentials. We demonstrate guiding of electrons and ions for a large range of energies (from 20 to 5000 eV) and masses (from 5 · 10⁻⁴ to 131 atomic mass units) as well as electron beam splitting for energies up to the keV regime as a proof-of-concept for more complex beam manipulation.

电子束和离子束是许多科学和技术领域必不可少的工具，范围从放射治疗到显微镜和光刻。先进的光束控制有助于实现新功能。在这里，我们报告了利用质子动力引导和分裂带电粒子束的过程，该动能是由带电粒子通过印刷在平面基板上的静电光学器件的运动而产生的。电势的形状和强度可以通过光刻产生的电极的布局和施加的电压进行局部调整，从而可以将带电粒子束控制在精确设计的有效电势之内。我们证明了在大范围的能量（从20到5000 eV）和质量（从5·10 ^-4）中电子和离子的引导 至131原子质量单位），以及用于达到keV态能量的电子束分裂，这是更复杂的束操作的概念证明。