In this work, an optimized, non-invasive four electrode-based impedimetric sensors have been designed, fabricated, and characterized for measuring the impedance of a biological cell. The impedimetric sensors having four mono-polar electrodes were fabricated utilizing the photolithography technique with gold as the electrode material. Furthermore, the impedance of the electrolyte/electrode interface was simulated by optimizing different parameters, including applied voltage, PBS thickness, and diameter, using COMSOL Multiphysics software for a frequency range of 100 Hz to 1 MHz. Next, the impedance of the fabricated device was measured experimentally using the electrochemical impedance spectroscopy (EIS) technique. Then, the COMSOL data was equated with the impedance obtained from the fabricated devices to realize the feasibility and error percentage (RSE < 5%) of the sensor. The equivalent circuit model for the measured impedance data of PBS was obtained utilizing the ZsimpWin software. Besides, the mathematical relations between the impedance, phase angle and the area of the electrode were interpreted for the fabricated impedimetric sensors. Later on, a real blood sample was also characterized to demonstrate the feasibility and the validity of the proposed technique and the fabricated devices in cell diagnosis.

在这项工作中，设计、制造和表征了一种优化的、非侵入性的基于四电极的阻抗传感器，用于测量生物细胞的阻抗。采用金作为电极材料的光刻技术制造了具有四个单极电极的阻抗传感器。此外，还使用 ​​COMSOL Multiphysics 软件在 100 Hz 至 1 MHz 的频率范围内优化不同参数（包括施加电压、PBS 厚度和直径）来模拟电解质/电极界面的阻抗。接下来，使用电化学阻抗谱 (EIS) 技术通过实验测量制造的器件的阻抗。然后，COMSOL 数据与从制造的设备获得的阻抗相等，以实现传感器的可行性和误差百分比 (RSE < 5%)。利用ZsimpWin软件获得PBS测量阻抗数据的等效电路模型。此外，解释了阻抗、相位角和电极面积之间的数学关系，用于制造的阻抗传感器。后来，还对真实的血液样本进行了表征，以证明所提出的技术和制造的设备在细胞诊断中的可行性和有效性。相位角和电极面积被解释为制造的阻抗传感器。后来，还对真实的血液样本进行了表征，以证明所提出的技术和制造的设备在细胞诊断中的可行性和有效性。相位角和电极面积被解释为制造的阻抗传感器。后来，还对真实的血液样本进行了表征，以证明所提出的技术和制造的设备在细胞诊断中的可行性和有效性。